Sweeping the lean angle can boost movie thickness uniformity and sidewall coverage whilst also avoiding higher energy-mirrored neutral species for critical processes.
In-situ optical checking and Management is available as a result of Angstrom’s optical monitoring & Management deal.
Goal rotation and carousel indexing each have torque feeling, avoiding any system troubles resulting from slips or jams in rotation.
In-situ ellipsometry provides vital information on the performance of an optical movie though it's becoming deposited.
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Variable angle stages allow for for quite potent skinny movie approaches. Nevertheless, one among its most significant issues is reproducibility. The substrate is usually established at an exceptionally oblique angle in relation to the resource, and also the films are certainly sensitive to the precision of this angle.
Angstrom Engineering® designs and engineers Each individual Reticle® System to deliver our associates inside the optics Local community the opportunity to build the films they have to have with great purity, density, and uniformity, all inside a hugely repeatable and automatic style.
Our unique style allows for direct or indirect monitoring from the variable angle stage, doing away with the necessity for tooling variables or possibly a witness glass changer. Find out more in regards to the Optical Monitoring & Control offer below.
IBSD processes may also utilize a secondary ion supply for substrate cleaning and energetic assist, substrate heating for reactive deposition, and in-situ optical checking or ellipsometry for critical layer thickness termination.
All typical Reticle® platforms contain an additional gridless finish-Hall ion supply with hollow cathode neutralizer.
The deposition ion supply is directed toward a cloth concentrate on that has been optimized in both of those size and place for your necessary deposition geometry.
Self-aligned ion optics are configured especially for the desired deposition prerequisites and geometry of the method.
A small-frequency neutralizer makes certain secure beam Procedure without High-purity metal products contamination from a traditional filament.
A shuttered QCM Positioned near the substrate gives feed-back within the deposition amount and physical thickness of your growing film.
Considerate style and design on the ion beam focusing optics confines the beam solely to the area on the target, eradicating any threat of contamination.